Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication (Record no. 40732)
| 000 -LEADER | |
|---|---|
| fixed length control field | 00666nam a2200277Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 181205s9999 xx 000 0 und d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 3-540-22369-X |
| 041 ## - LANGUAGE CODE | |
| Language code of text/sound track or separate title | ENGLISH |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38.049.77 LUO |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Luo (J); Dornfeld (D A) |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Relator term | AUTHOR |
| 245 #0 - TITLE STATEMENT | |
| Title | Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Date of publication, distribution, etc. | 2004 |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Date of publication, distribution, etc. | Springer-Verlag Berlin Heidelberg |
| 300 ## - PHYSICAL DESCRIPTION | |
| Other physical details | Paper |
| 300 ## - PHYSICAL DESCRIPTION | |
| Accompanying material | Hard Pack |
| 300 ## - PHYSICAL DESCRIPTION | |
| Size of unit | NO |
| 365 ## - TRADE PRICE | |
| Price amount | 0 |
| 365 ## - TRADE PRICE | |
| Price amount | 8108.88 |
| 365 ## - TRADE PRICE | |
| Unit of pricing | 1 |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE | |
| Bibliography, etc. note | 35 |
| 520 ## - SUMMARY, ETC. | |
| Summary, etc. | Fabrics |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Fabrics |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Books |
| 952 ## - LOCATION AND ITEM INFORMATION (KOHA) | |
| -- | TBS/3733 / 31.10.2006 |
| -- | 0 |
| -- | Purchase |
| Withdrawn status | Lost status | Damaged status | Not for loan | Collection code | Permanent Location | Current Location | Shelving location | Date acquired | Source of acquisition | Cost, normal purchase price | Inventory number | Full call number | Barcode | Date last seen | Price effective from | Koha item type | Public note |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| | | | | Reference | Kumaraguru College of Technology | Kumaraguru College of Technology | REF | 2006-11-28 | Technical Book Source"202, Onkar House, 155, Aggarwal Road, Darya GanjDelhi,New Delhi,India-110 002,011 [email protected]" | 8108.88 | 2006-11-28 | 621.38.049.77 LUO | 40725 | 2018-12-05 | 2018-12-05 | Reference | TT |