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Fundamentals of Microfabrication and Nanotechnology :Solid-State Physics, Fluidics, and Analytical Techniques in Micro and Nanotechnology

by Madou (Marc J)
Edition statement:3 Published by : CRC Press (Boca Raton) Physical details: 641 HB ISBN:9781420055115.
Subject(s): Microelectronics
Year: 2012
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