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Fundamentals of Microfabrication and Nanotechnology Vol III: From MEMS to Bio-MEMS and Bio-NEMS Manufacturing Techniques and Applications

Madou (Marc J)

Fundamentals of Microfabrication and Nanotechnology Vol III: From MEMS to Bio-MEMS and Bio-NEMS Manufacturing Techniques and Applications - - Taylor & Francis Group 13+636

Hard Binding

ISBN: 9781420055160

Subjects--Topical Terms:
Microelectronics

Dewey Class. No.: 621.38.049.77 MAD

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Fundamentals of Microfabrication and Nanotechnology Vol III: From MEMS to Bio-MEMS and Bio-NEMS Manufacturing Techniques and Applications

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