000 00506nam a2200229Ia 4500
008 181205s9999 xx 000 0 und d
020 _a0-07-100736-9
100 _aElliott (David J)
100 _eAUTHOR
245 0 _aIntegrated Circuit Fabrication Technology Ed 2
260 _c1989
260 _cMcgraw-Hill Publishing Co.
300 _bPAPER PACK
300 _eHARD BACK
300 _gNO
365 _b0
365 _b890
365 _d1
504 _a15
942 _cBK
999 _c12852
_d12852