| 000 | 00490nam a2200229Ia 4500 | ||
|---|---|---|---|
| 008 | 181205s9999 xx 000 0 und d | ||
| 020 | _a81-7023-763-7 | ||
| 100 | _aRao (V V) ;Ghosh (T B) | ||
| 100 | _eAUTHOR | ||
| 245 | 0 | _aVacuum Science And Technology | |
| 260 | _c1998 | ||
| 260 | _cAllied Publishers Ltd | ||
| 300 | _bPAPER PACK | ||
| 300 | _ePAPER BACK | ||
| 300 | _gNO | ||
| 365 | _b0 | ||
| 365 | _b120 | ||
| 365 | _d1 | ||
| 504 | _a15 | ||
| 942 | _cBK | ||
| 999 |
_c17763 _d17763 |
||