| 000 | 00613nam a2200277Ia 4500 | ||
|---|---|---|---|
| 008 | 181205s9999 xx 000 0 und d | ||
| 020 | _a0-8247-5824-2 | ||
| 041 | _aENGLISH | ||
| 082 | _a621.318 ALL | ||
| 100 | _aAllen (James J) | ||
| 100 | _eAUTHOR | ||
| 245 | 0 | _aMicro Electro Mechanical System Design | |
| 260 | _c2005 | ||
| 260 | _cCrc Press | ||
| 300 | _bPaper | ||
| 300 | _eHard Pack | ||
| 300 | _gNO | ||
| 365 | _b0 | ||
| 365 | _b7004 | ||
| 365 | _d1 | ||
| 504 | _a22.5 | ||
| 520 | _aMicro Electro Mechanical | ||
| 650 | _aMicro Electro Mechanical | ||
| 942 | _cBK | ||
| 999 |
_c38830 _d38830 |
||