000 00452nam a2200181Ia 4500
008 191125s9999 xx 000 0 und d
020 _a9780444516169
041 _a12+312
041 _aENGLISH
082 _a621.37 BAO
100 _aBao (Minhang)
245 0 _aAnalysis & Design Principles of Mems Devices
260 _bElsevier
_c12+312
365 _b5438
_dRupees
563 _aPaper Pack
650 _aElectromechanical / MEMS
942 _cBK
999 _c62377
_d62377