000 00589nam a2200193Ia 4500
008 191125s9999 xx 000 0 und d
020 _a9781420055115
041 _a13+641
041 _aENGLISH
082 _a621.38.049.77 MAD
100 _aMadou (Marc J)
245 0 _aFundamentals of Microfabrication and Nanotechnology Vol I: Solid- State Physics, Fluidics, and Analytical Techniques in Micro-and Nanotechnology
250 _n3
260 _bTaylor & Francis Group
_c13+641
365 _b4351.3
_dRupees
563 _aHard Binding
650 _aMicroelectronics
942 _cBK
999 _c69937
_d69937