| 000 | 00582nam a2200193Ia 4500 | ||
|---|---|---|---|
| 008 | 191125s9999 xx 000 0 und d | ||
| 020 | _a9781420055160 | ||
| 041 | _a13+636 | ||
| 041 | _aENGLISH | ||
| 082 | _a621.38.049.77 MAD | ||
| 100 | _aMadou (Marc J) | ||
| 245 | 0 | _aFundamentals of Microfabrication and Nanotechnology Vol III: From MEMS to Bio-MEMS and Bio-NEMS Manufacturing Techniques and Applications | |
| 250 | _n3 | ||
| 260 |
_bTaylor & Francis Group _c13+636 |
||
| 365 |
_b4351.3 _dRupees |
||
| 563 | _aHard Binding | ||
| 650 | _aMicroelectronics | ||
| 942 | _cBK | ||
| 999 |
_c69939 _d69939 |
||