000 00582nam a2200193Ia 4500
008 191125s9999 xx 000 0 und d
020 _a9781420055160
041 _a13+636
041 _aENGLISH
082 _a621.38.049.77 MAD
100 _aMadou (Marc J)
245 0 _aFundamentals of Microfabrication and Nanotechnology Vol III: From MEMS to Bio-MEMS and Bio-NEMS Manufacturing Techniques and Applications
250 _n3
260 _bTaylor & Francis Group
_c13+636
365 _b4351.3
_dRupees
563 _aHard Binding
650 _aMicroelectronics
942 _cBK
999 _c69939
_d69939