000 00488nam a2200193Ia 4500
008 191125s9999 xx 000 0 und d
020 _a9788184894134
041 _a19+650
041 _aENGLISH
082 _a577.2 BRO
100 _aBrodie (Ivor); Muray (Julius)
245 4 _aThe Physics of Micro/ Nano- Fabrication
250 _n0
260 _bSpringer (India) P. Ltd.,
_c19+650
365 _b1195
_dRupees
563 _aPaper Pack
650 _aNano Technology
942 _cBK
999 _c70176
_d70176