000 00479nam a2200193Ia 4500
008 191125s9999 xx 000 0 und d
020 _a9780444516169
041 _a12+312
041 _aENGLISH
082 _a621.37 BAO
100 _aBao (Minhang)
245 0 _aAnalysis And Design Principles of MEMS Devices
250 _n0
260 _bElsevier B V
_c12+312
365 _b6669
_dRupees
563 _aHard Binding
650 _aElectromechanical / MEMS
942 _cBK
999 _c72207
_d72207