000 00483nam a2200193Ia 4500
008 191125s9999 xx 000 0 und d
020 _a9780849312625
041 _a12+461
041 _aENGLISH
082 _a621.37 LYS
100 _aLyshevski (Sergey E)
245 0 _aMEMS and NEMS: Systems, Devices and Structures
250 _n0
260 _bCRC Press LLC
_c12+461
365 _b695
_dRupees
563 _aPaper Pack
650 _aElectromechanical / MEMS
942 _cBK
999 _c73504
_d73504